摘要

Phase space methods are very popular for illumination systems or paraxial system analysis. In this paper it will be shown that it is also a promising tool to visualize and quantify surface aberration contributions, including all orders. The method is based on the calculation and propagation of a differential ray pair. In order to validate the method we compare to Aldis calculus, an exact method to determine high order aberrations in rotational symmetric systems. A triplet lens is used as an example to visualize the results. The analysis indicates that the phase space method is a very good approximation to Aldis calculus and moreover it is not limited to any symmetry assumptions.

  • 出版日期2016-3-21