A Near-Infrared Optomechanical Intracranial Pressure Microsensor

作者：Ghannad Rezaie Mostafa^*; Yang Lynda J S; Garton Hugh J L; Chronis Nikos

来源：Journal of Microelectromechanical Systems, 2012, 21(1): 23-33.

DOI：10.1109/JMEMS.2011.2171322

• BioMEMS
• BioOptics
• implantable wireless sensor
• intracranial pressure
• MRI compatible
• near-infrared fluorescent
• quantum dot (QD)

We present a wireless and power-free, optomechanical, implantable microsensor that can potentially be used to accurately monitor intracranial pressure (ICP) over long periods of time. The developed microsensor vertically integrates a glass mini-lens with a two-wavelength quantum dot (QD) micropillar that is photolithographically patterned on an ICP-exposed silicon nitride membrane. The operation principle is based on a novel optomechanical transduction scheme that converts ICP changes into changes in the intensity ratio of the two-wavelength, near-infrared fluorescent light emitted from the QDs. The microsensor is micro-fabricated using silicon bulk micromachining, and it operates at an ICP clinically relevant pressure dynamic range (0-40 mmHg). The microsensor has a maximum error of less than 15% throughout its dynamic range, and it is extremely photostable. We believe that the proposed microsensor will open up a new direction not only in ICP monitoring but in other pressure-related biomedical applications. [2010-0349]

• 出版日期2012-2