A Gap-Closing Electrostatic Actuator With a Linear Extended Range

作者：Shmulevich Shai^*; Rivlin Ben; Hotzen Inbar; Elata David

来源：Journal of Microelectromechanical Systems, 2013, 22(5): 1109-1114.

DOI：10.1109/JMEMS.2013.2276027

• Electrostatic actuators
• nonlinear springs
• gap-closing
• extended range
• linear response

We present a gap-closing electrostatic actuator with a linear extended range. We achieve this by designing a nonlinear spring that exactly counteracts the nonlinear effects of electrostatic attraction forces in gap-closing actuators. We demonstrate this on parallel-plates actuators with a nominal gap of g = 21 mu m. The initial response up to a deflection of g/4 is stable and is inevitably nonlinear, but beyond this point we demonstrate good linearity up to a displacement of 85% of the nominal gap. By introducing the nonlinear spring, we also avoid the pullin instability, which would have occurred at a voltage of 31 V. Instead, the system is stable and the driving voltage may be increased up to 130 V where the maximal displacement is achieved. [2013-0132]

• 出版日期2013-10