Direct Bonding of Ferroelectrics

作者：Rosenman G^*; Torchinsky I

来源：Ferroelectrics, 2008, 373: 51-68.

DOI：10.1080/00150190802408663

• Ferroelectrics
• lithium tantalate
• direct bonding
• wettability
• surface free energy
• contact angle

A method for modifying the surface free energy of lithium tantalate ferroelectric crystals is reported. Ultraviolet illumination and low-energy electron irradiation have been used for tuning the surface free energy resulting in a wide range of wettability contact angles. The UV illumination makes the crystal polar face superhydrophilic while the electron irradiation strongly decreases the surface wetting. Basic thermodynamic approaches such as Zisman, Owens-Wendt, and Van Oss-Chaudhury-Good have been applied to calculations of elementary interactions responsible for bonding of solids. Fabrication of various wetting configurations allows to demonstrate high quality direct bonding of lithium tantalate plates with hydrophilic polarfaces.

• 出版日期2008