Gas barrier properties of diamond-like carbon films coated on PTFE

作者：Ozeki K^*; Nagashima I; Ohgoe Y; Hirakuri K K; Mukaibayashi H; Masuzawa T

来源：Applied Surface Science, 2009, 255(16): 7286-7290.

DOI：10.1016/j.apsusc.2009.03.082

• Gas barrier
• Diamond-like carbon
• PTFE
• Process pressure
• Adhesive strength

Diamond-like carbon (DLC) films were deposited on polytetrafluoroethylene (PTFE) using radio frequency (RF) plasma-enhanced chemical vapour deposition (PE-CVD). Before the DLC coating, the PTFE substrate was modified with a N(2) plasma pre-treatment to enhance the adhesive strength of the DLC to the substrate. The influences of the N(2) plasma pre-treatment and process pressure on the gas permeation properties of these DLC-coated PTFE samples were investigated. In the Raman spectra, the G peak position shifted to a lower wave number with increasing process pressure. With scanning electron microscopy (SEM), a network of microcracks was observed on the surface of the DLC film without N(2) plasma pre-treatment. The density of these cracks decreased with increasing process pressure. In the film subjected to a N(2) plasma pre-treatment, no cracks were observed at any process pressure. In the gas barrier test, the gas permeation decreased drastically with increasing film thickness and saturated at a thickness of 0.2 mu m. The DLC-coated PTFE with the N(2) plasma pre-treatment exhibited a greater reduction in gas permeation than did the samples without pre-treatment. For both sample types, gas permeation decreased with increasing process pressure.

• 出版日期2009-5-30