Nanomechanical Switch Designs to Overcome the Surface Adhesion Energy Limit

作者:Chen I Ru*; Qian Chuang; Yablonovitch Eli; Liu Tsu Jae King
来源:IEEE Electron Device Letters, 2015, 36(9): 963-965.
DOI:10.1109/LED.2015.2463119

摘要

An analytical model is developed to assess the switching energy of a nanomechanical switch. Alternative switch designs are proposed to leverage spring-restoring force to counterbalance surface adhesion force, reducing the depth of the potential energy well created by contact adhesion and thereby overcoming the surface adhesion energy limit.

  • 出版日期2015-9