Multilayer Graphene-WSe2 Heterostructures for WSe2 Transistors

作者:Tang, Hao-Ling; Chiu, Ming-Hui; Tseng, Chien-Chih; Yang, Shih-Hsien; Hou, Kuan-Jhih; Wei, Sung-Yen; Huang, Jing-Kai; Lin, Yen-Fu; Lien, Chen-Hsin*; Li, Lain-Jong*
来源:ACS Nano, 2017, 11(12): 12817-12823.
DOI:10.1021/acsnano.7b07755

摘要

Two-dimensional (2D) materials are drawing growing attention for next generation electronics and optoelectronics owing to its atomic thickness and unique physical properties. One of the challenges posed by 2D materials is the large source/drain (S/D) series resistance due to their thinness, which may be resolved by thickening the source and drain regions. Recently explored lateral graphene MoS21-3 and graphene-WS21,4 heterostructures shed light on resolving the mentioned issues owing to their superior ohmic contact behaviors. However, recently reported field-effect transistors (FETs) based on graphene-TMD heterostructures have only shown n-type characteristics. The lack of p-type transistor limits their applications in complementary metal-oxide semiconductor electronics. In this work, we demonstrate p-type FETs based on graphene-WSe2 lateral heterojunctions grown with the scalable CVD technique. Few-layer WSe2 is overlapped with the multilayer graphene (MLG) at MLG-WSe2 junctions such that the contact resistance is reduced. Importantly, the few layer WSe2 only forms at the junction region while the channel is still maintained as a WSe2 monolayer for transistor operation. Furthermore, by imposing doping to graphene S/D, 2 orders of magnitude enhancement in I-on/I-off ratio to similar to 10(8) and the unipolar p-type characteristics are obtained regardless of the work function of the metal in ambient air condition. The MLG is proposed to serve as a 2D version of emerging raised source/drain approach in electronics.