Deposition of ZrNxOy films by filtered cathodic vacuum arc

作者：Chen, Y. M.; Zhang, H. Q.; Li, Z. W.; Cao, W.; Liao, B.; Zhang, X.^*

来源：Surface Engineering, 2013, 29(8): 567-571.

DOI：10.1179/1743294413Y.0000000163

• Filtered cathodic vacuum arc
• ZrNxOy films
• Band gap
• Refractive index
• Mechanical property

Zirconium oxynitride (ZrNxOy) thin films were prepared by filtered cathodic vacuum arc technique using N-2/O-2 mixtures. The effect of N-2/O-2 ratios on the microstructure, optical and mechanical properties of films had been investigated. X-ray diffraction results showed that o-Zr3N4(O) phase was observed at low oxygen flowrate, while tetragonal and monoclinic phases of ZrO2 were detected at high one. Optical test revealed that the films changed from semitransparent to transparent, and the absorption edge shifted to lower wavelength with the increase in oxygen flowrate. The refractive indexes of films ranged from 2.24 to 3.47, and the optical band gap increased from 2.06 to 4 eV with the increasing oxygen content, which implied that the films had potentials in optoelectronic applications.

• 出版日期2013-9
• 单位北京师范大学