Nanostructuring of Iron Surfaces by Low-Energy Helium Ions

作者：Tanyeli Irem^*; Marot Laurent; van de Sanden Mauritius C M; De Temmerman Gregory

来源：ACS Applied Materials & Interfaces, 2014, 6(5): 3462-3468.

DOI：10.1021/am405624v

• surface modification
• iron
• He ion plasma

The behavior of iron surfaces under helium plasma exposure is investigated as a function of surface temperature, plasma exposure time, and He ion flux. Different surface morphologies are observed for a large process parameter range and discussed in terms of temperature-related surface mechanisms. Surface modification is observed under low-He ion flux (in the range of 10(20) m(-2) s(-1)) irradiation, whereas fiberlike iron nanostructures are formed by exposing the surface to a high flux (in the range of 10(23) m(-2) s(-1)) of low-energy He ions at surface temperatures of 450-700 degrees C. The effects of surface temperature and plasma exposure time on nanostructures are studied. The results show that surface processing by high-flux low-energy He ion bombardment provides a size-controlled nanostructuring on iron surfaces.

• 出版日期2014-3-12