A superhard CrAlSiN superlattice coating deposited by multi-arc ion plating: I. Microstructure and mechanical properties

作者：Zhang, Shihong^*; Wang, Lei; Wang, Qimin; Li, Mingxi

来源：Surface and Coatings Technology, 2013, 214: 160-167.

DOI：10.1016/j.surfcoat.2012.05.144

• Microstructure
• Mechanical properties
• Cr-Al-Si-N coatings
• Multi-arc ion plating

A superhard CrAlSiN superlattice coating was deposited by multi-arc ion plating (M-AIP). The coating microstructure and mechanical properties were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM), nano-indentation, scratch test and pin-on-disk tribo-test The HRTEM results indicated that the CrAlSiN coating has a superlattice structure containing alternating fcc-(Cr, Al) N and h-(Al, Si) N layers with a period (X) of 7.0 /- 02 nm. The coherent epitaxial growth structure was observed along {0001} plane of the h -(Al, Si) N phase and (111) plane of the fcc-(Cr,Al) N phase, due to the template effect offcc-(Cr, Al) N crystal layer. The CrAlSiN coating exhibited a high hardness (52 GPa), high resistance to plastic deformation (H-3/E*(2) = 0295 GPa), and high adhesion strength (critical load: 50 N). The wear test showed that the superhard CrAlSiN coating has a very low friction coefficient (0.1-0.2) against the counterpart material of WC/Co. The related mechanisms were discussed.

• 出版日期2013-1-15
• 单位安徽工业大学; 广州大学