Composition Dependence of Piezoelectric Properties of Pb(Zr, Ti)O-3 Films Prepared by Combinatorial Sputtering

作者：Tomioka Kohei^*; Kurokawa Fumiya; Yokokawa Ryuji; Kotera Hidetoshi; Adachi Kazuhiko; Kanno Isaku

来源：Japanese Journal of Applied Physics, 2012, 51(9): 09LA12.

DOI：10.1143/JJAP.51.09LA12

We examined the composition and orientation dependences of the piezoelectric properties by combinatorial sputtering. PbTiO3 and PbZrO3 were simultaneously sputtered to prepare composition gradient Pb(Zr, Ti)O-3 (PZT) films on Pt/Ti/Si substrates, and an almost linear composition gradient was observed in a range of Zr/(Zr + Ti) ratios from 0.33 to 0.76. Dielectric and piezoelectric properties attained maximum at the Zr/ Ti composition close to the morphotropic phase boundary (MPB), which is consistent with that of PZT ceramics. {100}-oriented PZT films showed a higher dielectric constant than the PZT films with the other orientations, while the PZT films with {111} + {100} mixed orientation showed larger values of e(31,f). These results suggest that the a-axis orientation is dominant in the {100}-oriented PZT films. In this study, we demonstrated that the combinatorial sputtering method enables the precise evaluation of the composition dependence of piezoelectric and dielectric properties.

• 出版日期2012-9