Deposition temperature dependence and long-term stability of the conductivity of undoped ZnO grown by atomic layer deposition

作者：Beh Holger^*; Hiller Daniel; Laube Jan; Gutsch Sebastian; Zacharias Margit

来源：Journal of Vacuum Science and Technology A, 2017, 35(1): 01B127.

DOI：10.1116/1.4972466

Understanding the stability and deposition parameter dependence of intrinsically conductive undoped ZnO prepared by thermal atomic layer deposition is mandatory for future applications. The authors investigate the conductivity of ZnO films deposited at temperatures between 100 and 200 degrees C as well as its evolution over a period of 160 days under different storing conditions. Most importantly, the conductivity increases by about 1 order of magnitude when the deposition temperature is increased from 100 to 150 degrees C. Highest conductivities of up to 170 S/cm are reached for >= 175 degrees C, and these samples do not show any aging effects of the conductivity under ambient storing conditions. In contrast, for deposition temperatures <= 150 degrees C, accelerated aging led to a significant decrease in conductivity. The best trade-off between the low deposition temperature and good long-term stable conductivity is found to be at 175 degrees C. A correlation between the intensity of the well-known defect photoluminescence peak (similar to 1.9 eV) and the conductivity was observed, which indicates that both are related to the same physical origin.

• 出版日期2017-2