MEMS-based air-gap cavity for entangled photon generation via polariton-polariton scattering

作者：Boozarjmehr Maryam^*

来源：Journal of Nanophotonics, 2015, 9(1): 093070.

DOI：10.1117/1.JNP.9.093070

• quantum wells
• excitons
• four-wave mixing
• actuator
• lithography
• materials

A structure for entangled photon generation via polariton-polariton scattering is proposed. We have designed an air-gap planar cavity with embedded quantum wells, in which the photonic modes are in strong coupling regime with excitons of quantum wells. An electrical tuning mechanism is designed by introducing an air-gap layer and an integrated electrical actuator to the distributed Bragg reflector (DBR) mirror structure. Our structure consists of 40 (17) bottom (top) DBRs with 12 GaAs/AlAs (7/3 nm) quantum wells at the antinodes of the electromagnetic field working at 767-nm wavelength. Initial air-gap thickness is 1500 nm. The Q factor and Rabi splitting of the structure are 1742 and 14 meV, respectively. Reflectivity of cavity/air interface is 0.32, and suspended DBR reflectivity is 0.97. Average indices of suspended mirror and cavity are 3.2062 and 3.1901, respectively. According to our simulation results, by changing air-gap thickness from 1000 to 1350 nm, the wavelength tuning range is extended to 30 nm via applying a maximum voltage of 12 V.

• 出版日期2015-5-22