A Compact Broadband Microwave Phase Detector Based on MEMS Technology

作者：Han, Juzheng^*; Liao, Xiaoping^*

来源：IEEE Sensors Journal, 2016, 16(10): 3480-3481.

DOI：10.1109/JSEN.2016.2540636

• Compact
• broadband
• phase detector
• micro electromechanical systems (MEMS)

A compact broadband microwave phase detector based on the micro electromechanical systems technology is presented in this letter. Cascaded asymmetrical coplanar striplines are adopted to achieve broadband performance over the whole X-band and the occupied size is reduced by 60% through capacitive loadings. The measured phase detection sensitivities are rather stable for different frequencies at X-band and are larger than 16.6, 49.6, 74.9, 89.9, and 101.2 mu V/degrees at 10, 50, 100, 150, and 200-mW input powers, respectively. These results double our previous works. The relative errors between the measurement and the theory are <9%. Response times are all below 2 ms with RF signal stimulus at different frequencies.

• 出版日期2016-5-15
• 单位东南大学