科研之友
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摘要
An analytical method has been developed for directly calculating the principal angle theta(p) at which the phase difference between the two reflection coefficients is equal to 90degrees and at which the ratio of \r(p)\ to \r(s)\ is equal or close to a minimum. The equations given here can be used in many optical applications. Fur example, ellipsometric data measured at an incidence angle theta(p) will have higher precision than data measured at other incidence angles. theta(p) is the principal angle. Instead of three principal angles, there is only one principal angle, which can be found in the region of 0 less than or equal to theta(p) less than or equal to 90degrees fur most metallic materials used in applications. Results show good agreement between the measured and the calculated spectra of Delta(p) and rho(po).
- 出版日期2002-5-1
- 单位复旦大学
