Additive nanoscale embedding of functional nanoparticles on silicon surface

作者：Cavallini Massimiliano^*; Simeone Felice C; Borgatti Francesco; Albonetti Cristiano; Morandi Vittorio; Sangregorio Claudio; Innocenti Claudia; Pineider Francesco; Annese Emilia; Panaccione Giancarlo; Pasquali Luca

来源：Nanoscale, 2010, 2(10): 2069-2072.

DOI：10.1039/c0nr00315h

We present a novel additive process, which allows the spatially controlled integration of nanoparticles (NPs) inside silicon surfaces. The NPs are placed between a conductive stamp and a silicon surface; by applying a bias voltage a SiO(2) layer grows underneath the stamp protrusions, thus embedding the particles. We report the successful nanoembedding of CoFe(2)O(4) nanoparticles patterned in lines, grids and logic structures.

• 出版日期2010