Ultra-precision nano-structure fabrication by amplitude control sculpturing method in elliptical vibration cutting

作者：Zhang Jianguo; Suzuki Norikazu^*; Wang Yilong; Shamoto Eiji

来源：Precision Engineering-journal of the International Societies for Precision Engineering and Nanotechnology, 2015, 39: 86-99.

DOI：10.1016/j.precisioneng.2014.07.009

• Elliptical vibration cutting
• Hardened steel
• Nano-structure
• Amplitude control sculpturing method
• Command compensation

This paper studies the nano-structure fabrication on hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this proposed method, machinable part geometry is essentially restricted by vibration conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, a series of analytical and experimental investigations are conducted. Furthermore, by applying the proposed command compensation method, nano-structures with a large ratio of structure height to wave length are machined accurately. The proposed sculpturing method is subsequently applied to the machining of nano-textured grooves and a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method.

• 出版日期2015-1