Anodic bonding of glass-ceramics to stainless steel coated with intermediate SiO(2) layer

作者：Xiong, Dehua^*; Cheng, Jinshu; Li, Hong; Deng, Wei; Ye, Kai

来源：Microelectronic Engineering, 2010, 87(9): 1741-1746.

DOI：10.1016/j.mee.2009.10.001

• Anodic bonding
• SiO(2)
• Glass-ceramics
• Stainless steel
• Intermediate layer

The anodic bonding between glass-ceramics and stainless steel (No. 430#) which was coated with SiO(2) layer were investigated. The SiO(2) layers with thickness comprised between 150 and 250 nm were coated on stainless steel surfaces by sol-gel method, the bonding process was achieved at 350 degrees C and 800 V for 45 min under atmosphere. The micro-topography and the compositions of the bonding interfaces were investigated by XRD, SEM and EDS. The results indicated SiO(2) layers could help the formation of the bonding with glass-ceramics to stainless steel, lithium iron oxide (LiFeO(2)) was observed on the surface of glass-ceramics after bonding, and the bonding strength increased with increasing bonding temperature or voltage.

• 出版日期2010-11
• 单位武汉理工大学