Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication

作者：Gennat Marc^*; Meinig Marco; Shaporin Alexey; Kurth Steffen; Rembe Christian; Tibken Bernd

来源：Journal of Microelectromechanical Systems, 2013, 22(3): 613-624.

DOI：10.1109/JMEMS.2012.2236076

• Frequency response measurements
• laser Doppler vibrometry
• microelectromechanical systems (MEMS) fabrication monitoring
• MEMS testing
• noncontact electrostatic excitation
• parameter identification
• uncertainty calculation
• wafer-level testing

A reliable technique for rapid monitoring of critical dimensional and material parameters during the fabrication of microelectromechanical systems (MEMS) is still an open task. Electrical excitation is sometimes simply not possible, or an electrical test does not reveal sufficient information for a complete characterization. In this paper, we present a new approach that employs optical testing of MEMS vibration frequencies. It is not necessary to have electrical connections because we have developed probes with transparent electrodes to excite vibrations electrostatically without contact on the wafer level. Broad-bandwidth excitation is applied to detect all relevant resonances interferometrically through the probes in a single broad-band measurement. Peak detection of the resonances results in a measurement vector containing the resonant frequencies. We demonstrate a new method to estimate system parameters by model identification. The analytical models are derived from a general approach based on finite-element analysis. The parameters with uncertainties are finally determined by guaranteed parameter estimation.

• 出版日期2013-6