Annealing effect on elastic, magnetic and magnetoelastic properties of CoFeB thin films on polymer substrate

作者：Zighem F^*; Faurie D; Belmeguenai M; Girodon Boulandet N; Gabor M S; Djemia P

来源：Journal of Physics D: Applied Physics , 2017, 50(45): 455002.

DOI：10.1088/1361-6463/aa8d0b

• CoFeB thin films
• annealing effect
• magnetoelastic properties
• magnetostriction
• polymer substrate

We have studied the magnetomechanical properties of Co20Fe60B20 thin films deposited on polyimide substrate. Particularly, we studied the effect of annealing in the accessible temperature range (0-375 degrees C) allowed by the polymer substrate. Complementary techniques have been used to characterize the elastic, magnetic and magnetoelastic properties of annealed samples (Brillouin light scattering and tensile tests combined with in situ ferromagnetic resonance). Below 200 degrees C, no significant evolutions of the properties have been found excepted the magnetic damping parameter. In contrast, above 200 degrees C, strong variations are observed (+ 15% for Young's modulus, -40% for magnetostriction coefficient and + 500% for the uniaxial magnetic anisotropy field). This is in correlation with the x-ray diffraction peak sharpening observed in the studied thin films. This is most probably due to exceeding of the glass transition temperature of the thin film. The complete data analysis allowed an estimation of the thermal stability of Co20Fe60B20 alloy thin films.

• 出版日期2017-11-15