Annealing effects on the thermoelectric properties of silver-doped bismuth telluride thin films

作者：Lin, Jyun Min^*; Chen, Ying Chung; Lin, Chi Pi; Chien, Heng Chieh; Wen, Chih Yu; Chang, Jui Yang; Zhan, Zheng You

来源：Microelectronic Engineering, 2015, 148: 51-54.

DOI：10.1016/j.mee.2015.08.008

• Thermoelectric
• Thermal evaporation
• Bi2Te3

The structures and thermoelectric properties of n-type silver-doped Bi2Te3 thin films on SiO2/Si substrates using thermal co-evaporation method were reported. Annealing effects on the thermoelectric properties of thin films were also investigated in the temperature range 100 to 250 degrees C under nitrogen atmosphere. The crystalline structures and morphologies were examined by X-ray diffraction and field emission scanning electron microscope. The thermoelectric properties of thin films were determined by Seebeck coefficients and electrical conductivity measurements. The results showed that as the thin film is annealed at 250 degrees C, the Seebeck coefficient and electrical conductivity of -47.04 mu V/K and 976.13 S.cm(-1) can be obtained, respectively, which resulted in an optimum power factor of about 2.16 mu W/cm.K-2.

• 出版日期2015-12-1
• 单位中山大学