A Polysilicon Microhemispherical Resonating Gyroscope

作者：Shao Peng^*; Mayberry Curtis L; Gao Xin; Tavassoli Vahid; Ayazi Farrokh

来源：Journal of Microelectromechanical Systems, 2014, 23(4): 762-764.

DOI：10.1109/JMEMS.2014.2327107

• Gyroscopes
• hemispherical shell resonator
• microelectromechanical system (MEMS)
• mode matching
• quality factor
• frequency mismatch

This letter reports, for the first time, an integrated polysilicon microhemispherical resonating gyroscope (mu HRG) with self-aligned drive, sense, and tuning electrodes, all fabricated using a single wafer process. The polysilicon hemispherical shell is 700 nm in thickness and 1.2 mm in diameter, resulting in a 1: 3000 aspect ratio three-dimensional (3-D) microstructure. The quality factor of the wineglass mode is measured to be 8500 at 6.7 kHz with an as-fabricated frequency mismatch of 105 Hz between the two m = 2 degenerate modes. The modes are electrostatically matched and aligned using the tuning electrodes with a resulting mode-matched quality factor of 11 100. Initial characterization of the sensitivity of the mu HRG shows a scale factor of 4.4 mV/degrees/s. [2014-0005]

• 出版日期2014-8