科研之友
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摘要
A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Cathodic arc spot and plasma distributions were photographed during the transition from a pure argon background (0.5 Pa) to a mixture of argon and oxygen. We report about unusual cathode erosion patterns, which were narrow (similar to 2 mm) with periodic pits when operating in argon, and broad (similar to 10 mm) with periodic groves and ridges when operating in argon and oxygen mixtures.
- 出版日期2014-10
