Facile fabrication of YSZ/GDC multi-layers by using a split target in pulsed laser deposition and their structural and electrical properties

作者：Park Jung Hoon; Hong Wan Shick; Lee Jong Ho; Yoon Kyung Joong; Kim Hyoungchul; Hong Jongsup; Song Hue Sup; Son Ji Won^*

来源：Journal of Electroceramics, 2014, 33(1-2): 25-30.

DOI：10.1007/s10832-014-9903-7

• Multi-layer thin films
• Pulsed laser deposition
• Split target
• YSZ
• GDC

Various configurations of the multi-layer of yttria-stabilized zirconia (YSZ) and gadolinia-doped ceria (GDC) are successfully fabricated through a novel method by means of pulsed laser deposition (PLD) utilizing a split target. By controlling the deposition conditions like the laser frequency and target configuration, YSZ/GDC multi-layers of different periodicities and YSZ/GDC thickness ratios can be easily and simply realized. The multi-layer fabricated by the proposed method exhibits nearly identical physical and electrical properties to those of the multi-layer films by the conventional layer-by-layer deposition method. The present study provides a facile and effective fabrication method for the design and application of multi-layered structure.

• 出版日期2014-10