A low-frequency MEMS piezoelectric energy harvester with a rectangular hole based on bulk PZT film

作者：Tian, Yingwei; Li, Guimiao; Yi, Zhiran; Liu, Jingquan; Yang, Bin^*

来源：Journal of Physics and Chemistry of Solids, 2018, 117: 21-27.

DOI：10.1016/j.jpcs.2018.02.024

• Low-frequency
• Piezoelectric energy harvester
• Phosphor bronze substrate
• Bulk PZT thick film

This paper presents a high performance piezoelectric energy harvester (PEH) with a rectangular hole to work at low-frequency. This PEH used thinned bulk PZT film on flexible phosphor bronze, and its structure included piezoelectric layer, supporting layer and proof mass to reduce the resonant frequency of the device. Here, thinned bulk PZT thick film was used as piezoelectric layer due to its high piezoelectric coefficient. A Phosphor bronze was deployed as supporting layer because it had better flexibility compared to silicon and could work under high acceleration ambient with good durability. The maximum open-circuit voltage of the PEH was 15.7 V at low resonant frequency of 34.3 Hz when the input vibration acceleration was 1.5 g (g = 9.81 m/s(2)). Moreover, the maximum output power, the output power density and the actually current at the same acceleration were 216.66 mu W, 1713.58 mu W/cm(3) and 170 mu A, respectively, when the optimal matched resistance of 60 k Omega was connected. The fabricated PEH scavenged the vibration energy of the vacuum compression pump and generated the maximum output voltage of 1.19 V.

• 出版日期2018-6
• 单位上海交通大学