Multireflection grazing incidence diffraction used for stress measurements in surface layers

作者：Marciszko M^*; Baczmanski A; Wrobel M; Seiler W; Braham C; Donges J; Sniechowski M; Wierzbanowski K

来源：Thin Solid Films, 2013, 530: 81-84.

DOI：10.1016/j.tsf.2012.05.042

• Residual stress
• X-ray diffraction
• Synchrotron radiation
• Grazing incidence method

The geometry based on the multireflection grazing incidence X-ray diffraction can be applied to measure residual stresses. Using this method, it is possible to perform a non-destructive analysis of the heterogeneous stresses for different and well defined volumes below the surface of the sample (range of several mu m). As the result, the average values of stresses weighted by absorption of X-ray radiation are measured. In this work the stress profiles as a function of penetration depth were determined for mechanically polished Al sample. Measurements and verification of the method were performed using classical X-ray diffractometer and synchrotron radiation with different wavelengths.

• 出版日期2013-3-1