Design of MEMS bionic vector hydrophone based on NBR sound-transparent cap

作者：Liu Mengran; Jian Ze Ming; Zhang Guojun^*; Guo Nan; Zhang Wendong

来源：Sensor Review, 2015, 35(3): 303-309.

DOI：10.1108/SR-11-2014-0744

• MEMS
• Sensors
• Sensitivity
• Frequency band
• NBR sound-transparent cap

Purpose - The purpose of this paper is to present a novel nitrile butadiene rubber (NBR) packaging structure, which can solve the problems of the low sensitivity, narrow frequency band and fluctuating frequency response curve of the MEMS bionic vector hydrophone.
Design/methodology/approach - A 0.05-mm-thick NBR sound-transparent cap was designed by theoretical analysis and simulation to reduce the signal attenuation caused by the packaging structure, and the frequency band of the hydrophone has been extended to 4 kHz. In this work, the vector hydrophone was fabricated by the MEMS technology and packaged with the NBR sound-transparent cap. The performance indicators were calibrated in the National Defence Underwater Acoustics Calibration Laboratory of China.
Findings - The results show that the sensitivity of NBR-packaged hydrophone reaches -170 dB (+/- 2 dB), and the difference is less than 1 dB compared to bare chip. And the frequency band is 50 Hz-4 kHz. The hydrophone also has good directional pattern in the form of an 8-shape, and the pressure-resisting ability is more than 2 MPa.
Originality/value - The packaging structure significantly increases the sensitivity of the hydrophone and broadens the frequency band, providing a new method in the packaging design for MEMS hydrophone.

• 出版日期2015
• 单位中北大学