Nanostructure evolution in cluster-assembled WO (x) films synthesized by radio-frequency assisted laser ablation

作者：Santo N; Filipescu M^*; Ossi P M; Dinescu M

来源：Applied Physics A-Materials Science & Processing, 2010, 101(2): 325-331.

DOI：10.1007/s00339-010-5825-7

We deposited WO (x) films by radio frequency assisted pulsed laser deposition (RF-PLD). We explored the roles of substrate temperature and ambient gas pressure-composition on film nanostructure to maximise the film surface area in view of gas sensing applications. A W target was ablated in highly reactive O-2 at 5 Pa and 700 Pa, as well as in a mixed oxygen-helium atmosphere at 700 Pa. Corning glass was used as the substrate, at increasing temperatures. Process parameters such as laser fluence and wavelength, radio-frequency power, target to substrate distance were kept fixed. The influence of the deposition parameters on roughness, morphology, nanostructure, and bond coordination of the deposited films were studied by Atomic Force Microscopy, Scanning Electron Microscopy, Transmission Electron Microscopy, and micro-Raman spectroscopy. Nanoparticle formation, the development of an extended, open nanostructure and its evolution toward compact films are discussed.

• 出版日期2010-11