科研之友
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摘要
An axisymmetric 2D model on a high-frequency inductively coupled Ar-Hg discharge is established, where all important radiation and collision processes between electrons and atoms, or atoms and atoms are involved. The boundary electric field is obtained from experiment with the single coil method. The simulation result depicts a diffusive discharge. It reveals that chemi-ionization between Hg(6-P) atoms plays an important role in ionization balance, while direct ionization of ground Hg atoms can be ignored. The calculated electron density and electron temperature agree well with the experimental results of other researchers.
- 出版日期2011-8-3
- 单位复旦大学
