A novel pixellated solid-state photon detector for enhancing the everhartthornley detector

作者：Chuah Joon Huang^*; Holburn David

来源：Microscopy Research and Technique, 2013, 76(6): 648-652.

DOI：10.1002/jemt.22212

• pixellated
• CMOS
• photon detector
• EverhartThornley detector
• secondary electron detection

This article presents a pixellated solid-state photon detector designed specifically to improve certain aspects of the existing EverhartThornley detector. The photon detector was constructed and fabricated in an Austriamicrosystems 0.35 mu m complementary metal-oxide-semiconductor process technology. This integrated circuit consists of an array of high-responsivity photodiodes coupled to corresponding low-noise transimpedance amplifiers, a selector-combiner circuit and a variable-gain postamplifier. Simulated and experimental results show that the photon detector can achieve a maximum transimpedance gain of 170 dB and minimum bandwidth of 3.6 MHz. It is able to detect signals with optical power as low as 10 nW and produces a minimum signal-to-noise ratio (SNR) of 24 dB regardless of gain configuration. The detector has been proven to be able to effectively select and combine signals from different pixels. The key advantages of this detector are smaller dimensions, higher cost effectiveness, lower voltage and power requirements and better integration. The photon detector supports pixel-selection configurability which may improve overall SNR and also potentially generate images for different analyses. This work has contributed to the future research of system-level integration of a pixellated solid-state detector for secondary electron detection in the scanning electron microscope. Microsc. Res. Tech. 76:648652, 2013.

• 出版日期2013-6