A new process for the manufacturing of reproducible mesoporous silicon membranes

作者：Pichonat Tristan^*; Gauthier Manuel Bernard

来源：Journal of Membrane Science, 2006, 280(1-2): 494-500.

DOI：10.1016/j.memsci.2006.02.010

• porous silicon
• membrane
• microfabrication techniques
• proton conduction
• miniature fuel cell

We report here the manufacturing of thick reproducible mesoporous silicon membranes with the description of the complete process. In the case of porous membranes, the advantages of using silicon are the possibility to use standard microfabrication techniques like wet and dry etching and then the easy integration with microelectronic systems and MEMS applications. Problems encountered and solutions are discussed. An application as a proton-conducting membrane for miniature fuel cells is proposed and has been implemented with encouraging results.

• 出版日期2006-9-1