Scattering light measurement of optical surfaces using a new dynamic angle limited integrated scattering method

作者：Gomez Rosas Gilberto^*; Villa Hernandez Jesus; Casillas Rodriguez Francisco J; Mora Gonzalez Miguel; Pena Lecona Francisco G; Munoz Maciel Jesus

来源：Optical Engineering, 2010, 49(5): 053607.

DOI：10.1117/1.3430630

• scattered light
• surface roughness
• surface testing
• angle resolved scattering

The dynamic angle limited integrated scattering (DALIS) method has been developed to examine optically smooth reflective surfaces with well-defined form. The DALIS system shows advantages over the conventional angle-resolved scattering. We propose a new configuration and results in the DALIS method by using a spherical mirror as a collecting element of the scattered light from the surface of a sample under test. Furthermore, the proposed method improves the detection of the scattered light and is suitable to be applied in workshop inspection during optical polishing processes.

• 出版日期2010-5