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摘要
In this paper, a novel CMOS monolithic positionsensitive detector (PSD) with stray illumination noise removal for light spot position detection applications is proposed. The light sensor and analog processing circuits are monolithically and compactly integrated. Compared with devices developed in previous studies, the proposed monolithic PSD not only has the basic functions of PSDs, but also achieves stray illumination noise removal. All the functions and performance of the proposed monolithic PSD were successfully tested and demonstrated through measurements. The proposed chip is suitable for devices involving light- spot position detection.
- 出版日期2017-3-15
