An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry

作者：Chen Kun Huang^*; Chiu Huang Sen; Chen Jing Heng; Chen You Cheng

来源：Measurement, 2012, 45(6): 1510-1514.

DOI：10.1016/j.measurement.2012.02.028

• Polarization angle
• Small displacement
• Dual-prism
• Heterodyne interferometry

This study proposes an optical method for measuring small displacements. In this method, two semispherical prisms are used as test apparatuses. Because testing lights inside the prisms are at polarization angles, the phase difference can be differentially magnified twice and the measurement resolution can be greatly increased. Furthermore, using common-path heterodyne interferometery ensures that this method is simple to implement, high accurate, and high stability against the vibration of the surrounding environment. The capability of this method was demonstrated with a sensitivity of 42.92 degrees/mm and a resolution of 23.29 nm.

• 出版日期2012-7