Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

作者：Sedao Xxx^*; Derrien Thibault J Y; Romer Gert willem R B E; Pathiraj Belavendram; in ' t Veld Albertus J Huis

来源：Journal of Applied Physics, 2012, 112(10): 103111.

DOI：10.1063/1.4767471

A micro-sphere array optic was employed for laser surface micro-structuring. This array optic consists of a hexagonally close-packed monolayer of silica micro-spheres. It was organized through a self-assembly process and held together on a glass support, without using any adhesives. The array assembly was then reversed, placed in direct contact with the substrate and exposed to 515 nm, 6.7 ps laser pulses. During the exposure, the silica spheres act as micro-lenses, which enhance the near-field light intensity underneath them. As the spheres are confined in the space between the substrate and glass support, they are not ejected during laser machining. Using this type of direct write laser machining, a large number of identical features (nano-holes) can be produced in parallel simultaneously. The holes drilled are a few hundred nanometres in diameter and the depth depends on the number of laser pulses applied. The impact of laser machining on the micro-spheres was also studied. The micro-spheres were contaminated or partially damaged after micro-structuring. Combination of a moderate laser pulse energy and multiple shots was found to ensure a good surface structuring quality and minimum damage to the spherical particles.

• 出版日期2012-11-15