Large Nonlinearity and Low Loss Ge-Sb-Se Glass Photonic Devices in Near-Infrared

作者：Zhou, Jie; Du, Qingyang; Xu, Peipeng; Zhao, Yang; Lin, Ruiqiang; Wu, Yuehao; Zhang, Peiqing; Zhang, Wei^*; Shen, Xiang

来源：IEEE Journal of Selected Topics in Quantum Electronics, 2018, 24(4): 6101306.

DOI：10.1109/JSTQE.2018.2827671

• Optical glass
• planar waveguide
• microresonator
• nonlinear optics

Ge28Sb12Se60 waveguides and microresonators were fabricated by thermal evaporation and dry etching technology. The low loss waveguides and high-index-contrast Ge28Sb12Se60 microring resonators were developed and demonstrated using the optimal parameters of CF4/CHF3 etching recipe. An intrinsic quality factor (Q-factor) of 2,3 X 10(5) with propagation loss of 2.4 dB/cm at 1550 11 m was obtained in this microring resonator with 800 X 400 nm cross-sectional dimension. Critically coupled resonator showed extinction ratio of > 30 dB. Nonlinear refractive index (n(2)) of 5.12 X 10(-18) m(2)/W for Ge28Sb12Se60 glass was measured and nonlinear coefficient (gamma) of 24 W-1 m(-1) asfabricated waveguide was also estimated. This paper illustrates the potential of Ge28Sb12Se60 glass as a low loss and large nonlinearity material for integrated photonics applications.

• 出版日期2018-7
• 单位宁波大学