Spatial Distribution of Light Emission in Microplasma under 100 mu m Gaps

作者:Blajan Marius*; Shimizu Kazuo
来源:Japanese Journal of Applied Physics, 2012, 51(8): 08HC03.
DOI:10.1143/JJAP.51.08HC03

摘要

Emission spectroscopy analysis was used to study the microplasma phenomena. The microplasma discharge in Ar, N-2/Ar, and O-2/Ar was analyzed in the discharge gap area, and the spatial distribution of active species was also measured outside the electrodes. The spatial distribution in the discharge gap showed a higher intensity of the N-2 second positive band system (N-2 SPS) peak towards the grounded electrode (anode). The measurement of OH peak at 308.9nm proved the existence of this excited species 1mm outside the electrodes area. Images of the discharges at various gaps showed that the diameter of streamers derived from microdischarges was about 10 mu m at the 100 mu m gap, then decreased relative to the decrease in gap width. For gas mixtures containing N-2 in Ar, a more diffuse discharge was observed with the decrease in the amount of N-2 in Ar. The results are necessary for optimizing microplasma processes such as surface treatment and biomedical applications.

  • 出版日期2012-8