A non-conventional ERL configuration for high-power EUV FELs

作者：Venturini M; Penn G

来源：NUCLEAR INSTRUMENTS %26 METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2015, 795: 219-227.

DOI：10.1016/j.nima.2015.05.069

• Free Electron Laser (FEL)
• Energy Recovery Linac (ERL)
• EUV lithography

We show that a standard Linac configuration (consisting of accelerating sections, linearizing section, and magnetic chicane compressor) currently used in drivers for single-pass EUV/x-ray FELs is compatible with energy recovery, provided that certain timing constraints are met. By circulating the spent, rather than the fresh beam as in a conventional high-power ERL FEL design, the beam brightness can be more easily preserved thus facilitating lasing at short wavelength. As in a conventional ERL, the proposed design allows for energy-spread compression, enabling low-energy beam dumping and high energy-recovery efficiency. Results from numerical simulations presented in this paper show that this configuration could, in principle, support the generation of multi-kW average radiation power required for high-volume production EUV lithography. Published by Elsevier B.V.

• 出版日期2015-9-21