Destruction of Chlorodifluoromethane (CHF2Cl) by Using Dielectric Barrier Discharge Plasma

作者：Mok Young Sun^*; Lee Sang Back; Chang Myung Shik

来源：IEEE Transactions on Plasma Science, 2009, 37(3): 449-455.

DOI：10.1109/TPS.2008.2011800

• Atmospheric pressure plasma reactor
• chlorodifluoromethane
• dielectric barrier

The destruction of chlorodifluoromethane (CHF2Cl) was studied in a nonthermal atmospheric pressure plasma reactor with a perforated dielectric barrier, which is capable of producing intense streamers without significant pressure drop across the reactor. The performance of the dielectric barrier discharge reactor was evaluated with the parameters including oxygen content, input power, feed-gas flow rate, and Initial CH2Cl concentration. It was found that the reactive species from N-2 mainly contributed to the destruction of CHF2 Cl rather titan those from oxygen and that the destruction efficiency largely decreased as the oxygen content increased. The change in the initial concentration did not nearly affect the destruction efficiency, which can partly be explained by the secondary destruction mechanism. The principle byproducts were identified using Fourier transform infrared spectroscopy, and chemical mechanisms were proposed for the destruction processes. According to the proposed mechanisms, COF2 Was found to act as the key intermediate destruction product to convert CHF2Cl into CO2 and CO.

• 出版日期2009-3