Preparation of transparent conductive indium tin oxide thin films from nanocrystalline indium tin hydroxide by dip-coating method

作者：Koroesi Laszlo; Papp Szilvia; Dekany Imre

来源：Thin Solid Films, 2011, 519(10): 3113-3118.

DOI：10.1016/j.tsf.2010.12.160

• Sol-gel deposition
• Indium tin oxide
• Surface morphology
• Sheet resistance
• Fourier transform infrared spectroscopy
• Particle size distribution
• Calcination

Indium tin oxide (ITO) thin films with well-controlled layer thickness were produced by dip-coating method. The ITO was synthesized by a sol-gel technique involving the use of aqueous InCl(3), SnCl(4) and NH(3) solutions. To obtain stable sols for thin film preparation, as-prepared Sn-doped indium hydroxide was dialyzed, aged, and dispersed in ethanol. Polyvinylpyrrolidone (PVP) was applied to enhance the stability of the resulting ethanolic sols. The transparent, conductive ITO films on glass substrates were characterized by X-ray diffraction, scanning electron microscopy and UV-Vis spectroscopy. The ITO layer thickness increased linearly during the dipping cycles, which permits excellent controllability of the film thickness in the range similar to 40-1160 nm. After calcination at 550 degrees C. the initial indium tin hydroxide films were transformed completely to nanocrystalline ITO with cubic and rhombohedral structure. The effects of PVP on the optical, morphological and electrical properties of ITO are discussed.

• 出版日期2011-3-1