A novel triode-type carbon nanotube field emission micro-cathode fabricated by using electrochemical and micromachining

作者：Deng, Min; Lu, Wenjing; Wang, Yan; Zang, Faheng; Ding, Guifu^*

DOI：10.1109/NEMS.2010.5592187

• Composite electroplating
• Electrochemical
• Emission testing
• Emitter structures
• Field emission property
• Good stability
• High current densities
• Uniform diameter

We report here an effective method for the fabrication of a large number of carbon nanotube (CNT) triode-type microcathodes. Our technique combines composite electroplating and micromachining, avoiding the tedious direct growth and the screen-printing procedures conventionally used to fabricate such structures. The emitter structure is characterized by uniform diameters and heights, as well as by high mechanical stability. In the structure, the leakage current to the gate can be reduced to near zero by coating the polysilicon on the gate. Field emission testing results show that the micro cathodes have quite good field-emission properties such as high current density (15mA/cm2at an applied electric field of 12Vμm-1), low turn-on field (2.4 V/μm), and good stability (109 h for 10% degradation of current density from 400μA/cm2) .

• 出版日期2010
• 单位上海交通大学