摘要

Al-Ti-N/Al-Cr-B-N multilayer films were synthesized by means of cathodic arc evaporation. The influence of the individual layer thicknesses on mechanical and tribological properties was systematically investigated and compared with Al-Cr-B-N single layer films. Al-Cr-B targets with 10 and 20 at.% B, respectively, were used in combination with Al- Ti targets, having an Al/Ti ratio of 1. The multilayer films exhibit enhanced hardness and significantly reduced residual compressive stress together with improved wear resistance compared to Al-Cr-B-N single layer films.

  • 出版日期2014-5-15