An ultraviolet sensor using spin-coated ZnO nanoparticles based on surface acoustic waves

作者：Lee Ki Jung; Oh Haekwan; Jo Minuk; Lee Keekeun; Yang Sang Sik^*

来源：Microelectronic Engineering, 2013, 111: 105-109.

DOI：10.1016/j.mee.2013.02.025

• Ultraviolet sensor
• ZnO nanoparticles
• Surface acoustic wave

This paper proposes an ultraviolet (UV) sensor based on surface acoustic waves (SAWs) using ZnO nanoparticles. The UV sensor consists of an UV-sensitive film and a piezoelectric substrate propagating shear-horizontal (SH) waves. The UV-sensitive film is fabricated using commercially available ZnO nanoparticles by a solution process. The material properties of the ZnO nanoparticle-based film were evaluated using scanning electron microscopy, photospectrometry, and X-ray diffraction. The characteristics of the SAW-based UV sensor were tested under UV light (lambda = 365 nm) using a network analyzer and a commercial UV lamp. The sensitivity and the linearity of the SAW-based UV sensor are 180.43 Hz/mu W and 0.932 in frequency shift and 0.14 degrees/mu W and 0.965 in phase shift, respectively. The fabrication of the newly developed SAW-based UV sensor is simple but shows comparable characteristics to sensors having a much more complex production process.

• 出版日期2013-11