Atomic Layer Deposition of p-Type Epitaxial Thin Films of Undoped and N-Doped Anatase TiO2

作者：Vasu K; Sreedhara M B; Ghatak J; Rao C N R

来源：ACS APPLIED MATERIALS %26 INTERFACES, 2016, 8(12): 7897-7901.

DOI：10.1021/acsami.6b00628

• N-doped TiO2 thin films
• atomic layer deposition
• epitaxial thin films
• p-type conductivity
• photoresponse
• p?n homojunction
• room-temperature ferromagnetism

Employing atomic layer deposition, we have grown p-type epitaxial undoped and N-doped anatase TiO2(001) thin films on c-axis Al2O3 substrate. From X-ray diffraction and transmission electron microscopy studies, crystallographic relationships between the film and the substrate are found to be (001)Ti...

• 出版日期2016-3-30