Aluminium Oxide Optical Film Fabricated with Ion-Assisted Deposition Using Sulphur Hexafluoride and Oxygen Working Gases

作者：Chen Yu Yun^*; Yen Liang Yu; Hsu Jin Cherng; Chen Huang Lu; Wang Paul W; Liu Hsiang Lin

来源：Optical Review, 2011, 18(3): 293-295.

DOI：10.1007/s10043-011-0057-4

• Al(2)O(3)
• ion-assisted deposition
• optical properties
• packing density
• SF(6)

Al(2)O(3) thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O(2) or SF(6), or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF(6) was used.

• 出版日期2011-6