A Closed-Loop Mode-Localized Accelerometer

作者：Yang, Jing; Zhong, Jiming; Chang, Honglong^*

来源：Journal of Microelectromechanical Systems, 2018, 27(2): 210-217.

DOI：10.1109/JMEMS.2017.2787544

• Accelerometer
• mode localization
• weakly coupled resonators
• closed-loop readout
• self-oscillation

This paper reports a closed-loop mode-localized accelerometer for the first time. The accelerometer utilizes weakly coupled single-tine resonators as the sensing element to decrease the number of vibration modes. Based on a proposed closed-loop readout technique, the transient responses of the mode-localized accelerometer can be measured directly in the time domain. The test results show that the measured amplitude ratio noise and the resolution under closed-loop circumstances are 1.409 x 10(-5)/root Hz and 7.608 mu g/root Hz, respectively, which are largely improved compared with those (9.883 x 10(-4)/root Hz and 0.744 mg/root Hz) under the open-loop measurement. The sensitivity based on the amplitude ratio readout is similar to 124 times higher than that of the frequency with the acceleration input of [-1g, +1g], which indicates that the high sensitivity of the mode-localized sensors can be also obtained utilizing closed-loop control.

• 出版日期2018-4
• 单位西北工业大学