摘要

For most longitudinal and bending hybrid linear ultrasonic motor, there exists an inherent coupling effect between two modals due to the structure defect, which shows the phenomenon of one phase piezoceramic exciting the other phase vibration or vice versa. A new modal decoupling motor was proposed with the longitudinal piezoceramics positioned in the middle part of Langevin transducer and the bending piezoceramics at longitudinal antinodal plane. The prototype, designed with frequency tuning method, showed obvious modal coupling reduction in impedance characteristics and laser vibrometer measurement, and also surpass previous motor in output performance.