Anodized Aluminum Oxide/Polydimethylsiloxane Hybrid Mold for Roll-to-Roll Nanoimprinting

作者：Kim Sanghoon; Hyun Seung; Lee Jaeyong; Lee Kyu Seong; Lee Woo; Kim Jin Kon

来源：Advanced Functional Materials, 2018, 28(23): 1800197.

DOI：10.1002/adfm.201800197

• AAO/PDMS hybrid mold
• anodized aluminum oxide (AAO)
• nanoimprinting
• polymer nanostructures
• roll-to-roll process

Two types (hard and soft) of the molds are widely used in nanoimprint lithography for a high throughput over a large area, and high-resolution parallel patterning. Although hard molds have proven excellent resolutions and can be used at high temperatures, cracks often occur in the mold in addition to the requirement of high imprinting pressure. On the other hand, though soft molds can operate at lower pressures, they give poor pattern resolution. Here, a novel hybrid mold of anodized aluminum oxide (AAO) template attached to a flexible polydimethylsiloxane (PDMS) plate is introduced. Due to the flexible nature of PDMS, various polymer nanostructures are obtained on flat and curved substrates without crack formation on the AAO mold surface. Furthermore, the hybrid mold is successfully used for roll-to-roll imprinting for the fabrication of high density array of various shaped polymeric nanostructures over a large area.

• 出版日期2018-6-6