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摘要
A high-speed confocal 3D profilometer based on the chromatic confocal technology and spinning Nipkow disk technique has been developed and tested. It can measure a whole surface topography by taking only one image that requires less than 0.3 s. Surface height information is retrieved based on the ratios of red, green, and blue color information. A new vector projection technique has developed to enhance the vertical resolution of the measurement. The measurement accuracy of the prototype system has been verified via different test samples.
- 出版日期2014-11
