A silicon micromachined gyroscope driven by the rotating carrier self

作者：Zhang Fuxue^*; Mao Xu; Liu Yu; Zhang Nan; Zhang Wei

来源：Rare Metal Materials and Engineering, 2006, 35: 519-521.

• rotating carrier
• micromachine
• gyroscope
• angular velocity

This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

• 出版日期2006-12
• 单位北京市科学技术情报研究所